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Inhaltsangabe
This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability.
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Reseña del editor
This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability.
Reseña del editor
The first textbook to be published for this subject area, this text is aimed at senior level and graduate courses in ULSI technology. This text follows the tradition of Sze's highly successful pioneering text on VLSI technology, and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature processes, rapid thermal processes, low damage plasma reactive ion etching, fine line lithography, cleaning technology, clean room technology, packing and reliability. As both editors and authors, Chang and Sze have contributed both academic expertise, as well as editorial expertise, to create a cohesive and user-friendly text out of each state-of-the-art subject area.
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ULSI Technology
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VLSI Technology
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VLSI Technology
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VLSI Technology
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McGraw-Hill Higher Education, 1996
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VLSI Technology
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McGraw-Hill Higher Education, 1996
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ULSI Technology (McGraw-Hill Series in Electrical and Computer Engineering)
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ULSI Technology
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McGraw-Hill College, New York, 1996
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ISBN 13: 9780070630628
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Hardcover. Zustand: Fine. No Jacket. Second Printing. Hardcover, xxv, 726 pp., photos, diagrams, charts. Excellent condition. Bestandsnummer des Verkäufers 023149
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