Rapid Thermal Processing: Science and Technology - Hardcover

 
9780122476907: Rapid Thermal Processing: Science and Technology
Hardcover
ISBN 10: 0122476905 ISBN 13: 9780122476907
Verlag: Academic Press, 1993

Inhaltsangabe

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

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Verlag
Academic Press
Erscheinungsdatum
1993
Sprache
Englisch
ISBN 10 
0122476905
ISBN 13 
9780122476907
Einband
Gebundene Ausgabe
Anzahl der Seiten
430
Herausgeber
Fair Richard B.
Kontakt zum Hersteller
Nicht verfügbar
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9780124119895: Rapid Thermal Processing: Science and Technology

Vorgestellte Ausgabe

ISBN 10:  0124119891 ISBN 13:  9780124119895
Verlag: Academic Press, 2012
Softcover