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Plasma Etching: An Introduction - Softcover

 
9780123959669: Plasma Etching: An Introduction

Inhaltsangabe

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

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