Effect of Disorder and Defects in Ion-Implanted Semiconductors: Optical and Photothermal Characterization: Semiconductors and Semimetals Volume 46 - Softcover

Softcover

ISBN 10: 0123993431 ISBN 13: 9780123993434

Verlag: Academic Press, 2011

Inhaltsangabe

Defects in ion-implanted semiconductors are important and will likely gain increased importance as annealing temperatures are reduced with successive IC generations. Novel implant approaches, such as MdV implantation, create new types of defects whose origin and annealing characteristics will need to be addressed. Publications in this field mainly focus on the effects of ion implantation on the material and the modification in the implanted layer after high temperature annealing. The editors of this volume and Volume 45 focus on the physics of the annealing kinetics of the damaged layer. An overview of characterization tehniques and a critical comparison of the information on annealing kinetics is also presented.

Details zur Ausgabe

• Verlag: Academic Press
• Erscheinungsdatum: 2011
• Sprache: Englisch
• ISBN 10: 0123993431
• ISBN 13: 9780123993434
• Einband: Taschenbuch
• Anzahl der Seiten: 334
• Herausgeber: Ghibaudo Gerard
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: eVatmaster Consulting GmbH; 497000000000; contact@evatmaster.com; ; Bettinastr. 30,60325; Frankfurt am Main; 60325; Deutschland