Interlayer Dielectrics for Semiconductor Technologies: 1 - Hardcover

Muraka, Shyam; Murarka, S. P.; Eizenberg, M.

Hardcover

ISBN 10: 0125112211 ISBN 13: 9780125112215

Verlag: Academic Press, 2003

Inhaltsangabe

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.

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By Shyam P Muraka

Details zur Ausgabe

• Verlag: Academic Press
• Erscheinungsdatum: 2003
• Sprache: Englisch
• ISBN 10: 0125112211
• ISBN 13: 9780125112215
• Einband: Tapa dura
• Anzahl der Seiten: 460
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Yeepin GmbH; 492000000000; sunshine12232@outlook.com; ; Alleestr.11; Kaiserslautern; Rheinland-Pfalz; 67655; Deutschland