9780126939507: A User's Guide to Ellipsometry
Hardcover
ISBN 10: 0126939500 ISBN 13: 9780126939507
Verlag: Academic Press, 1993

Inhaltsangabe

This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.

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Verlag
Academic Press
Erscheinungsdatum
1993
Sprache
Englisch
ISBN 10 
0126939500
ISBN 13 
9780126939507
Einband
Gebundene Ausgabe
Anzahl der Seiten
260
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
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9780486450285: A User's Guide to Ellipsometry (Dover Civil and Mechanical Engineering)

Vorgestellte Ausgabe

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Softcover