This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.
Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement of film thickness and optical constants in films. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry and the effect of substrate roughness. The text's concepts and applications are reinforced through 14 case studies that aim to illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
„Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.
EUR 7,91 für den Versand von USA nach Deutschland
Versandziele, Kosten & DauerEUR 37,66 für den Versand von USA nach Deutschland
Versandziele, Kosten & DauerAnbieter: ThriftBooks-Dallas, Dallas, TX, USA
Hardcover. Zustand: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less 1.23. Bestandsnummer des Verkäufers G0126939500I3N00
Anzahl: 1 verfügbar
Anbieter: BoundlessBookstore, Wallingford, Vereinigtes Königreich
Zustand: Very Good. VG condition book without dust jacket. Boards are clean with little wear. Book has clean and bright contents, pen and previous owner stamp front endpaper, 260pp with illustrations. Bestandsnummer des Verkäufers 9999-9994450153
Anzahl: 1 verfügbar
Anbieter: The Book Corner, Beaverton, OR, USA
hardcover. Zustand: Very Good. Hardback. No dust jacket. Cover edges and corners in good shape. Spine is tight. Former owner's name inside front cover Pages are clean, no markings, notes or stains. Ships from Friends bookstore to benefit Beaverton (Oregon) library. Bestandsnummer des Verkäufers mon0000061385
Anzahl: 1 verfügbar
Anbieter: PASCALE'S BOOKS, NORTH READING, MA, USA
Hard Cover. Zustand: Fine-. 260 pages. "Ellipsometry is a very old technque for studying surfaces and thein films. It is also used extensively in integrated circuit(IC) manufacture and development, in corrosion science, and various other areas. The fundamental principles of the technqiues are well known. Although the literature is extensive, the few available books deal with the subect on a level that is too mathematical or theoretical for most casual users. FINE- HARDCOVER, black cloth covers, lettering is bright on the spine and cover. Size: 8vo - over 7¾" - 9¾" tall. Bestandsnummer des Verkäufers 028511
Anzahl: 1 verfügbar
Anbieter: HPB-Red, Dallas, TX, USA
Hardcover. Zustand: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Bestandsnummer des Verkäufers S_377864099
Anzahl: 1 verfügbar
Anbieter: dsmbooks, Liverpool, Vereinigtes Königreich
Hardcover. Zustand: Good. Good. book. Bestandsnummer des Verkäufers D7S9-1-M-0126939500-4
Anzahl: 1 verfügbar
Anbieter: BennettBooksLtd, North Las Vegas, NV, USA
hardcover. Zustand: New. In shrink wrap. Looks like an interesting title! Bestandsnummer des Verkäufers Q-0126939500
Anzahl: 1 verfügbar
Anbieter: Toscana Books, AUSTIN, TX, USA
Hardcover. Zustand: new. Excellent Condition.Excels in customer satisfaction, prompt replies, and quality checks. Bestandsnummer des Verkäufers Scanned0126939500
Anzahl: 1 verfügbar