Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products (Oxford Science Publications) - Hardcover

Taniguchi

Hardcover

ISBN 10: 0198562837 ISBN 13: 9780198562832

Verlag: OXFORD UNIV PR, 1996

Inhaltsangabe

The manufacture of integrated circuits and opto-electronic devices, for example, calls for accuracies in the nanometer range (approximately three atomic lattice spacings). This book, written by leading researchers in Japan, examines the technology and systems needed to achieve this level of accuracy. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer). Since the distance between lattice atoms is about 0.3nm, this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. Nanotechnology is concerned with integrated processing systems for measurement, position control, and processing technologies in the sub-nm range. It will be essential in the fabrication of extremely precise and fine parts.

Details zur Ausgabe

• Verlag: OXFORD UNIV PR
• Erscheinungsdatum: 1996
• Sprache: Englisch
• ISBN 10: 0198562837
• ISBN 13: 9780198562832
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 424
• Herausgeber: Taniguchi Norio, Maruyama Kazuo
• Kontakt zum Hersteller: ORIGINAL KAISER; https://corp.oup.com/; ; Via Liguria 4; San Giuliano Milanese ; MI; 20098; Italien