Electron Beam Testing Technology (Microdevices) - Hardcover

Hardcover

ISBN 10: 0306443600 ISBN 13: 9780306443602

Verlag: Springer, 1993

Inhaltsangabe

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being fabricated on design rules of several microns, the mechanical ne edle probe served quite adequately for internal chip probing. This scenario changed with growing device complexity and shrinking geometries, prompting IC manufacturers to take note ofthis new testing technology. It required several more years and considerable investment by electron beam tester manufacturers, however, to co me up with user-friendly automated systems that were acceptable to IC test engineers. These intervening years witnessed intense activity in the development of instrumentation, testing techniques, and system automation, as evidenced by the proliferation of technical papers presented at conferences. With the shift of interest toward applications, the technology may now be considered as having come of age.

Details zur Ausgabe

• Verlag: Springer
• Erscheinungsdatum: 1993
• Sprache: Englisch
• ISBN 10: 0306443600
• ISBN 13: 9780306443602
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 478
• Herausgeber: Thong John T.L.
• Kontakt zum Hersteller: Springer Heidelberg; buchhandel-buch@springer.com; ; Tiergartenstr. 17; Heidelberg; 69121; Deutschland