A User's Guide to Vacuum Technology - Hardcover

O'Hanlon, John F.

Hardcover

ISBN 10: 0471812420 ISBN 13: 9780471812425

Verlag: John Wiley & Sons Inc, 1989

Inhaltsangabe

This book introduces the reader to the theory and practice of modern vacuum technology, with applications. It focuses on the understanding, operation and selection of equipment for vacuum processes used in semiconductor, optical and related technologies. This second edition has new information on components, lubrication, pump fluids and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. The book will be of benefit to electrical and mechanical engineers and graduate students. The previous edition of this book was published in 1980.

Details zur Ausgabe

• Verlag: John Wiley & Sons Inc
• Erscheinungsdatum: 1989
• Sprache: Englisch
• ISBN 10: 0471812420
• ISBN 13: 9780471812425
• Einband: Gebundene Ausgabe
• Auflage: 2
• Anzahl der Seiten: 512
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Buchpark GmbH; gpsr@buchpark.de; ; Krügerweg 1; Trebbin; Brandenburg; 14959; Deutschland