Analysis of Microelectronic Materials and Devices - Softcover

 
9780471950134: Analysis of Microelectronic Materials and Devices

Inhaltsangabe

This book presents, for the first time, a comprehensive survey ofanalytical techniques currently used in support of all stages ofmicroelectronic materials and device processing. The diversity oftopics covered in this book has been achieved by bringing togetheran international field of authors contributing specializedindividual chapters. This has ensured that each technique isdiscussed in detail giving in-depth treatments of the subjectmatter. A particularly helpful feature in this book is the concisetechnical summary given at the end of each section. Four majorareas are considered in this volume:
* Bulk analysis of microelectronic materials

* Analysis of surfaces, interfaces and thin films

* Structure analysis on an atomic scale

* Characterization of physical, electrical and topographicfeatures
Complete with over 400 illustrations, this volume is anindispensible guide to analytical support for the microelectronicindustry.

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Über die Autorin bzw. den Autor

M. Grasserbauer and H. W. Werner are the authors of Analysis of Microelectronic Materials and Devices, published by Wiley.

Von der hinteren Coverseite

This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in-depth treatments of the subject matter. A particularly helpful feature in this book is the concise technical summary given at the end of each section. Four major areas are considered in this volume:

  • Bulk analysis of microelectronic materials
  • Analysis of surfaces, interfaces and thin films
  • Structure analysis on an atomic scale
  • Characterization of physical, electrical and topographic features
Complete with over 400 illustrations, this volume is an indispensible guide to analytical support for the microelectronic industry.

Aus dem Klappentext

This book presents, for the first time, a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered in this book has been achieved by bringing together an international field of authors contributing specialized individual chapters. This has ensured that each technique is discussed in detail giving in-depth treatments of the subject matter. A particularly helpful feature in this book is the concise technical summary given at the end of each section. Four major areas are considered in this volume:

  • Bulk analysis of microelectronic materials
  • Analysis of surfaces, interfaces and thin films
  • Structure analysis on an atomic scale
  • Characterization of physical, electrical and topographic features
Complete with over 400 illustrations, this volume is an indispensible guide to analytical support for the microelectronic industry.

„Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.

Weitere beliebte Ausgaben desselben Titels

9780471917137: Analysis of Microelectronic Materials and Devices

Vorgestellte Ausgabe

ISBN 10:  0471917133 ISBN 13:  9780471917137
Verlag: John Wiley & Sons Ltd, 1991
Hardcover