Laser Chemical Processing for Microelectronics (Cambridge Studies in Modern Optics, Band 7) - Hardcover

Ibbs, K. G.

 
9780521322546: Laser Chemical Processing for Microelectronics (Cambridge Studies in Modern Optics, Band 7)

Inhaltsangabe

Nine contributors describe the application of laser processing techniques in the fabrication of semiconductor materials and devices for the microelectronics industry. Chapters focus on deposition, etching, doping, and direct write capability (pantography) beginning with a review of the current literature and understanding. Annotation copyright Book News, Inc. Portland, Or.

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