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Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications - Hardcover

Attwood, David T.

 
9780521652148: Soft X-Rays and Extreme Ultraviolet Radiation: Principles and Applications

Inhaltsangabe

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.

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