Characterization and Metrology for ULSI Technology 2005 (AIP Conference Proceedings, 788, Band 788) - Hardcover

Hardcover

ISBN 10: 0735402779 ISBN 13: 9780735402775

Verlag: American Institute of Physics, 2005

Inhaltsangabe

The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed.

Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.

Details zur Ausgabe

• Verlag: American Institute of Physics
• Erscheinungsdatum: 2005
• Sprache: Englisch
• ISBN 10: 0735402779
• ISBN 13: 9780735402775
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 687
• Herausgeber: Seiler David G., Diebold Alain C., McDonald Robert, Ayre Caroline R., Khosla Rajinder P., Zollner Stefan, Secula Erik M.
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Nicht verfügbar