Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, ... of Physics Conference Series, Band 160) - Hardcover

Doneker, J.; Rechenberg, I.

 
9780750305006: Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, ... of Physics Conference Series, Band 160)
Hardcover
ISBN 10: 0750305002 ISBN 13: 9780750305006
Verlag: Springer-Verlag GmbH, 1998

Inhaltsangabe

Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.

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Über die Autorin bzw. den Autor

Doneker, J.

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Verlag
Springer-Verlag GmbH
Erscheinungsdatum
1998
Sprache
Englisch
ISBN 10 
0750305002
ISBN 13 
9780750305006
Einband
Gebundene Ausgabe
Anzahl der Seiten
548
Kontakt zum Hersteller
CRC Press
https://www.routledge-ny.com

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