Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, ... of Physics Conference Series, Band 160) - Hardcover

Doneker, J.; Rechenberg, I.

Hardcover

ISBN 10: 0750305002 ISBN 13: 9780750305006

Verlag: Springer-Verlag GmbH, 1998

Inhaltsangabe

Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.

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Über die Autorin bzw. den Autor

Doneker, J.

Details zur Ausgabe

• Verlag: Springer-Verlag GmbH
• Erscheinungsdatum: 1998
• Sprache: Englisch
• ISBN 10: 0750305002
• ISBN 13: 9780750305006
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 548
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