Strained si Heterostructure Field Effect Devices (Series in Material Science and Engineering, 15, Band 15) - Hardcover

Buch 3 von 21: Series in Materials Science and Engineering

Maiti, C. K.; Chattopadhyay, S; Bera, L. K.

 
9780750309936: Strained si Heterostructure Field Effect Devices (Series in Material Science and Engineering, 15, Band 15)
Hardcover
ISBN 10: 0750309938 ISBN 13: 9780750309936
Verlag: Taylor & Francis Ltd, 2007

Inhaltsangabe

A combination of the materials science, manufacturing processes, and pioneering research and developments of SiGe and strained-Si have offered an unprecedented high level of performance enhancement at low manufacturing costs. Encompassing all of these areas, Strained-Si Heterostructure Field Effect Devices addresses the research needs associated with the front-end aspects of extending CMOS technology via strain engineering. The book provides the basis to compare existing technologies with the future technological directions of silicon heterostructure CMOS.

After an introduction to the material, subsequent chapters focus on microelectronics, engineered substrates, MOSFETs, and hetero-FETs. Each chapter presents recent research findings, industrial devices and circuits, numerous tables and figures, important references, and, where applicable, computer simulations. Topics covered include applications of strained-Si films in SiGe-based CMOS technology, electronic properties of biaxial strained-Si films, and the developments of the gate dielectric formation on strained-Si/SiGe heterolayers. The book also describes silicon hetero-FETs in SiGe and SiGeC material systems, MOSFET performance enhancement, and process-induced stress simulation in MOSFETs.

From substrate materials and electronic properties to strained-Si/SiGe process technology and devices, the diversity of R&D activities and results presented in this book will no doubt spark further development in the field.

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Über die Autorin bzw. den Autor

C.K Maiti, S Chattopadhyay, L.K Bera

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Verlag
Taylor & Francis Ltd
Erscheinungsdatum
2007
Sprache
Englisch
ISBN 10 
0750309938
ISBN 13 
9780750309936
Einband
Gebundene Ausgabe
Anzahl der Seiten
400
Kontakt zum Hersteller
Nicht verfügbar
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