Characterization in Compound Semiconductor Processing (Materials Characterization Series) - Hardcover

Strausser, Yale

Hardcover

ISBN 10: 0750692669 ISBN 13: 9780750692663

Verlag: Butterworth-Heinemann Ltd, 1994

Inhaltsangabe

Characterization in Compound Semiconductor Processing is for scientists and engineers working with compound semiconductor materials and devices who are not characterization specialists. Materials and processes typically used in R&D and in the fabrication of GaAs, GaAlAs, InP and HgCdTe based devices provide examples of common analytical problems. The book discusses a variety of characterization techniques to provide insight into how each individually, or in combination, might be used in solving problems associated with these materials. The book will help in the selection and application of the appropriate analytical techniques by its coverage of all stages of materials or device processing: substrate preparation, epitaxial growth, dielectric film deposition, contact formation and dopant introduction.

Details zur Ausgabe

• Verlag: Butterworth-Heinemann Ltd
• Erscheinungsdatum: 1994
• Sprache: Englisch
• ISBN 10: 0750692669
• ISBN 13: 9780750692663
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 250
• Herausgeber: McGuire Gary E.
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Barbara Criscuolo; b.criscuolo@lswr.it; ; Via Spadolini, 7; Milano; 20141; Italien