Handbook of Sputter Deposition Technology: Principles, Technology and Applications (Materials Science and Process Technology Series) - Softcover

Wasa, Kiyotaka; Hayakawa, Shigeru

Softcover

ISBN 10: 0815512805 ISBN 13: 9780815512806

Verlag: William Andrew, 1992

Inhaltsangabe

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.

Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

Details zur Ausgabe

• Verlag: William Andrew
• Erscheinungsdatum: 1992
• Sprache: Englisch
• ISBN 10: 0815512805
• ISBN 13: 9780815512806
• Einband: Taschenbuch
• Anzahl der Seiten: 316
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Buchpark GmbH; gpsr@buchpark.de; ; Krügerweg 1; Trebbin; Brandenburg; 14959; Deutschland