Miniaturized Systems With Micro-Optics and Mems: 20-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3878) - Softcover

Society Of Photo-Optical Instrumentation Engineers; Solid State Technology (Organization)

 
9780819434753: Miniaturized Systems With Micro-Optics and Mems: 20-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3878)

Inhaltsangabe

These scientific papers discuss miniaturized systems with micro-optics and microelectromechanical systems (MEMS) from a range of perspectives.

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