Microlithography: Science and Technology (Opitcal Science and Engineering) - Hardcover

Buch 26 von 98: Optical Science and Engineering
 
9780824790240: Microlithography: Science and Technology (Opitcal Science and Engineering)
Hardcover
ISBN 10: 0824790243 ISBN 13: 9780824790240
Verlag: CRC Press Inc, 2007

Inhaltsangabe

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts.

New in the Second Edition
In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including:

  • Immersion Lithography
  • 157nm Lithography
  • Electron Projection Lithography (EPL)
  • Extreme Ultraviolet (EUV) Lithography
  • Imprint Lithography
  • Photoresists for 193nm and Immersion Lithography
  • Scatterometry

Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition.

Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.

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Über die Autorin bzw. den Autor

Edited by Kazuaki Suzuki, Nikon Corporation, Saitama, Japan, Saitama, 360-8559, Japan Edited by Bruce W. Smith, Rochester Institute of Technology, New York, USA, Rochester NY, U.S.A

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Verlag
CRC Press Inc
Erscheinungsdatum
2007
Sprache
Englisch
ISBN 10 
0824790243
ISBN 13 
9780824790240
Einband
Gebundene Ausgabe
Auflage
2
Anzahl der Seiten
848
Herausgeber
Suzuki Kazuaki, Smith Bruce W.
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Buchpark GmbH
gpsr@buchpark.de

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