This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.
Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.
"The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field." -International Journal of Electrical Engineering Education Promo Copy
This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.
„Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.
EUR 3,23 für den Versand innerhalb von/der USA
Versandziele, Kosten & DauerEUR 3,43 für den Versand innerhalb von/der USA
Versandziele, Kosten & DauerAnbieter: HPB-Red, Dallas, TX, USA
Hardcover. Zustand: Acceptable. Connecting readers with great books since 1972. Used textbooks may not include companion materials such as access codes, etc. May have condition issues including wear and notes/highlighting. We ship orders daily and Customer Service is our top priority! Bestandsnummer des Verkäufers S_376969239
Anzahl: 1 verfügbar
Anbieter: ThriftBooks-Dallas, Dallas, TX, USA
Hardcover. Zustand: Fair. No Jacket. Missing dust jacket; Readable copy. Pages may have considerable notes/highlighting. ~ ThriftBooks: Read More, Spend Less 2.4. Bestandsnummer des Verkäufers G0824799534I5N01
Anzahl: 1 verfügbar
Anbieter: ThriftBooks-Dallas, Dallas, TX, USA
Hardcover. Zustand: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less 2.4. Bestandsnummer des Verkäufers G0824799534I3N00
Anzahl: 1 verfügbar
Anbieter: WeBuyBooks, Rossendale, LANCS, Vereinigtes Königreich
Zustand: Very Good. Most items will be dispatched the same or the next working day. A copy that has been read, but is in excellent condition. Pages are intact and not marred by notes or highlighting. The spine remains undamaged. Bestandsnummer des Verkäufers wbs6056463860
Anzahl: 1 verfügbar
Anbieter: Books Puddle, New York, NY, USA
Zustand: New. pp. 800 1st Edition. Bestandsnummer des Verkäufers 261780318
Anzahl: 1 verfügbar
Anbieter: Majestic Books, Hounslow, Vereinigtes Königreich
Zustand: New. pp. 800. Bestandsnummer des Verkäufers 7116161
Anzahl: 1 verfügbar
Anbieter: Biblios, Frankfurt am main, HESSE, Deutschland
Zustand: New. pp. 800. Bestandsnummer des Verkäufers 181780308
Anzahl: 1 verfügbar
Anbieter: Xochi's Bookstore & Gallery, Truth or consequences, NM, USA
Hardcover. Zustand: Fine. No Jacket. 2nd. 780pp.incl.index; HB white w/blk.&purple; PONft.endpaper, otherwise fine condition w/clean,tight pgs. "This self-contained reference/text details both elementary and advanced aspects of submicron microlithography -- providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field." illus. Bestandsnummer des Verkäufers 016384
Anzahl: 1 verfügbar
Anbieter: BennettBooksLtd, San Diego, NV, USA
Hardcover. Zustand: New. In shrink wrap. Looks like an interesting title! Bestandsnummer des Verkäufers Q-0824799534
Anzahl: 1 verfügbar
Anbieter: Romtrade Corp., STERLING HEIGHTS, MI, USA
Zustand: New. This is a Brand-new US Edition. This Item may be shipped from US or any other country as we have multiple locations worldwide. Bestandsnummer des Verkäufers ABNR-155181
Anzahl: 1 verfügbar