Microlithography: Science and Technology - Hardcover

Hardcover

ISBN 10: 0824799534 ISBN 13: 9780824799533

Verlag: Marcel Dekker Inc, 1998

Inhaltsangabe

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

Details zur Ausgabe

• Verlag: Marcel Dekker Inc
• Erscheinungsdatum: 1998
• Sprache: Englisch
• ISBN 10: 0824799534
• ISBN 13: 9780824799533
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 780
• Herausgeber: Sheats James R., Smith Bruce W.
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Nicht verfügbar