Microelectronics Processing: Chemical Engineering Aspects (Advances in Chemistry Series, Band 221) - Hardcover

 
9780841214750: Microelectronics Processing: Chemical Engineering Aspects (Advances in Chemistry Series, Band 221)
Hardcover
ISBN 10: 0841214751 ISBN 13: 9780841214750
Verlag: American Chemical Society, 1989

Inhaltsangabe

Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the
basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in
microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.

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Verlag
American Chemical Society
Erscheinungsdatum
1989
Sprache
Englisch
ISBN 10 
0841214751
ISBN 13 
9780841214750
Einband
Gebundene Ausgabe
Anzahl der Seiten
524
Herausgeber
Hess Dennis W., Jensen Klavs F.
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
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