Inhaltsangabe
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Introduction to Microlithography (ACS Professional Reference Book)
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American Chemical Society (edition 2), 1994
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ISBN 13: 9780841228481
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Introduction to Microlithography (ACS Professional Reference Book)
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Introduction to Microlithography (ACS Professional Reference Book)
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ISBN 13: 9780841228481
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Intro Microlith 2ed Acspr C
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Intro Microlith 2ed Acspr C
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Introduction to Microlithography (ACS Professional Reference Book)
Verlag:
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
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Introduction to Microlithography
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American Chemical Society, Washington, DC, 1994
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Introduction to Microlithography (ACS Professional Reference Book)
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American Chemical Society, 1994
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ISBN 13: 9780841228481
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Introduction to Microlithography
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Introduction to Microlithography. 2nd Edition.
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Washington, D.C., U.S.A.: Amer Chemical Society, 1994
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