Introduction to Microlithography (Acs Professional Reference Book) - Hardcover

 
9780841228481: Introduction to Microlithography (Acs Professional Reference Book)
Hardcover
ISBN 10: 0841228485 ISBN 13: 9780841228481
Verlag: American Chemical Society, 1994

Inhaltsangabe

Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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Verlag
American Chemical Society
Erscheinungsdatum
1994
Sprache
Englisch
ISBN 10 
0841228485
ISBN 13 
9780841228481
Einband
Gebundene Ausgabe
Auflage
2
Anzahl der Seiten
540
Herausgeber
Thompson Larry F., Willson C. Grant, Bowden Murrae J.
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar