Polymeric Materials for Microelectronic Applications: Science and Technology (Acs Symposium Series, Band 579) - Hardcover

Kobunshi Gakkai (Japan) Polymers For Microelectronics And Photonics Gr; American Chemical Society Division Of Polymeric Materials: Science And

 
9780841230552: Polymeric Materials for Microelectronic Applications: Science and Technology (Acs Symposium Series, Band 579)

Inhaltsangabe

Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive
materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.

Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.