Verwandte Artikel zu Micro-And Nanopatterning Polymers (Acs Symposium Series)

Micro-And Nanopatterning Polymers (Acs Symposium Series) - Hardcover

 
9780841235816: Micro-And Nanopatterning Polymers (Acs Symposium Series)
Hardcover
ISBN 10: 0841235813 ISBN 13: 9780841235816
Verlag: American Chemical Society, 1998

Inhaltsangabe

Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. The book includes discussions of material design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insight into the most recent breakthroughs in nano-technology, this unique book is an important step in the development of integrated circuits.

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Verlag
American Chemical Society
Erscheinungsdatum
1998
Sprache
Englisch
ISBN 10 
0841235813
ISBN 13 
9780841235816
Einband
Gebundene Ausgabe
Anzahl der Seiten
386
Herausgeber
Ito Hiroshi, Reichmanis Elsa, Nalamasu Omkaram, Ueno Takumi
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Messaggerie Libri
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