Micro- And Nanopatterning Polymers: No. 706 (ACS Symposium S.) - Hardcover

Ito, Hiroshi; Reichmanis, Elsa; Nalamasu, Omkaram; Ueno, Takumi

Hardcover

ISBN 10: 0841235813 ISBN 13: 9780841235816

Verlag: American Chemical Society, 1998

Inhaltsangabe

Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, this book describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. Also included are discussions of material design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insights into breakthroughs in nano-technology, this book is designed to be an important step in the development of integrated circuits. This book is intended for graduate level polymer scientists in the microelectronics industry.

Über diesen Titel

Críticas

_

Details zur Ausgabe

• Verlag: American Chemical Society
• Erscheinungsdatum: 1998
• Sprache: Englisch
• ISBN 10: 0841235813
• ISBN 13: 9780841235816
• Einband: Tapa dura
• Anzahl der Seiten: 400
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Messaggerie Libri ; ufficio.anagrafiche@meli.it; ; Via Verdi, 8; Assago Milano; Italien