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Nanolithography And Patterning Techniques in Microelectronics - Hardcover

Buch 8 von 203: Woodhead Publishing Series in Electronic and Optical Materials
 
9780849334474: Nanolithography And Patterning Techniques in Microelectronics
Hardcover
ISBN 10: 0849334470 ISBN 13: 9780849334474
Verlag: CRC Press Inc, 2005

Inhaltsangabe

Nanolithography and Patterning Techniques in Microelectronics examines the new range of techniques that have made it possible to develop complex patterns at the nanoscale and explores their industrial applications. This book considers ways of forming and modifying surfaces for patterning and provides information on specific patterning techniques such as soft lithography, ion beam patterning, use of nanostencils, photolithography, and inkjet printing. It also discusses prototyping and the manufacture of particular devices. With a distinguished team of contributors, this is an ideal reference for researchers and professionals using advanced polymers in such areas as microelectronics and biomedical devices.

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Verlag
CRC Press Inc
Erscheinungsdatum
2005
Sprache
Englisch
ISBN 10 
0849334470
ISBN 13 
9780849334474
Einband
Gebundene Ausgabe
Auflage
1
Anzahl der Seiten
409
Herausgeber
Bucknall David G.
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar