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Silicide Technology for Integrated Circuits (Processing, Band 5) - Hardcover

 
9780863413520: Silicide Technology for Integrated Circuits (Processing, Band 5)
Hardcover
ISBN 10: 0863413528 ISBN 13: 9780863413520
Verlag: Institution of Engineering and Technology, 2005

Inhaltsangabe

This is the first book to provide guidance on the development and application of metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages.

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Über die Autorin bzw. den Autor

Professor Chen received his PhD in physics from UC Berkeley in 1974. He became a faculty member in the Department of Materials Science and Engineering, National Tsing Hua University in 1977. He is currently the Dean, College of Engineering and Chair Professor, Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan. Professor Chen has conducted extensive research on integrated circuits thin film materials for almost three decades. His current research interests include interfacial reaction of metal thin films on silicon and Si-Ge alloys, advanced metallisation in integrated circuits as well as nanostructured materials.

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Verlag
Institution of Engineering and Technology
Erscheinungsdatum
2005
Sprache
Englisch
ISBN 10 
0863413528
ISBN 13 
9780863413520
Einband
Gebundene Ausgabe
Anzahl der Seiten
300
Herausgeber
Chen Lih J.
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar