Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (Materials Science Forum) - Softcover

 
9780878493913: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (Materials Science Forum)
Softcover
ISBN 10: 0878493913 ISBN 13: 9780878493913
Verlag: Trans Tech Publications Ltd, 2008

Inhaltsangabe

Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging and is still a field ripe for further development.

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Verlag
Trans Tech Publications Ltd
Erscheinungsdatum
2008
Sprache
Englisch
ISBN 10 
0878493913
ISBN 13 
9780878493913
Einband
Taschenbuch
Anzahl der Seiten
448
Herausgeber
Ltd Trans Tech Publications, Lerch Wielfried, Niess Jürgen
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar