Kinetic Studies in GeO2/Ge System: A Retrospective from 2021 (Frontiers in Semiconductor Technology) - Softcover

Wang, Sheng-kai

Softcover

ISBN 10: 1032258489 ISBN 13: 9781032258485

Verlag: CRC Press, 2024

Inhaltsangabe

Kinetic Studies in GeO₂/Ge System: A Retrospective from 2021 investigates reaction kinetics in GeO₂/Ge systems, aiming to demonstrate the fundamentals of the GeO₂/Ge interface and to give insight into the distinctive features and performance of Ge (germanium) applied to advanced complementary metal oxide semiconductor (CMOS) devices.

This book first reviews the development of MOS technology and discusses the potentials of emerging Ge and the challenges facing it as a contentious channel material, once promising to replace Si (silicon) for advanced nodes. The study systematically analyzes the following aspects of GeO₂/Ge stacks that will shed light on the characteristics and reaction principles of the system: GeO₂/Ge degradation, Ge passivation techniques, desorption kinetics of GeO from GeO₂/Ge, the relationship between GeO₂ crystallization and GeO₂/Ge interface reaction, and the oxidation kinetics of Ge. Based on findings from the intrinsic properties of GeO₂/Ge, the author also compares it with prevalent SiO₂/Si systems and demonstrates the essential differences between the two, contributing to quality control, process optimization, and technology advancements of GeO₂/Ge.

The book will be a useful reference for researchers, professionals, and students interested in electronic materials, condenser matter physics, microelectronic engineering, and semiconductors.

Über diesen Titel

Über die Autorin bzw. den Autor

Sheng-Kai Wang is a professor in the Institute of Microelectronics at the Chinese Academy of Sciences (IMECAS), China, and Director General of the Youth Innovation Promotion Association of IMECAS. He has been engaged in Ge, III-V, and SiC in MOS technology for years and has published more than 100 papers and authorized more than 40 patents.

Details zur Ausgabe

• Verlag: CRC Press
• Erscheinungsdatum: 2024
• Sprache: Englisch
• ISBN 10: 1032258489
• ISBN 13: 9781032258485
• Einband: Taschenbuch
• Anzahl der Seiten: 156
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: gpsr@libri.de; gpsr@libri.de; ; Friedensallee 273; Hamburg; 22763; Deutschland