Measurement Technology for Micro-Nanometer Devices - Hardcover

Zhang, Wendong; Chou, Xiujian; Shi, Tielin; Ma, Zongmin; Bao, Haifei; Chen, Jingdong; Chen, Liguo; Li, Dachao; Xue, Chenyang

9781118717967: Measurement Technology for Micro-Nanometer Devices

Hardcover

ISBN 10: 1118717961 ISBN 13: 9781118717967

Verlag: John Wiley & Sons Inc, 2016

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A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale

• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices

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�ber die Autorin bzw. den Autor

WENDONG ZHANG, North University of China, China

XIUJIAN CHOU, North University of China, China

TIELIN SHI, Huazhong University of Science and Technology, China

ZONGMIN MA, North University of China, China

HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China

JING CHEN, Peking University, China

LIGUO CHEN, Soochow University, China

DACHAO LI, Tianjin University, China

CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China

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An important reference for experts and students engaged in micro-nano device (MND) measuring technology, this book collects the latest research from production and academia on MND test technology, especially in the basic theories and experimental methods of MND online testing, dynamic testing, and typical device testing. It explains the methodologies in a simple and concise way, introducing MND measuring technology systematically and comprehensively, with cutting-edge research findings and technical practicality.

A fully comprehensive examination of state-of-the-art technologies for measurementon a small scale
Highlights the advanced research work from industry and academia in MND test technology
Written at both introductory and advanced levels, provides the fundamentals as well as advanced theories
Focuses on the measurement techniques for characterizing MEMS/NEMS devices

A fully comprehensive examination of state-of-the-art technologies for MND measurement, this book is aimed at graduate students in the fields of instrument science technology, precision manufacture, and optic instrument manufacture. It is also a valuable reference for engineers and researchers in micro- and nano-fabrication, MEMS/NEMS devices, and advanced instrumentation.

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