Measurement Technology for Micro-Nanometer Devices - Hardcover

Zhang, Wendong; Chou, Xiujian; Shi, Tielin; Ma, Zongmin; Bao, Haifei; Chen, Jingdong; Chen, Liguo; Li, Dachao; Xue, Chenyang

9781118717967: Measurement Technology for Micro-Nanometer Devices

Hardcover

ISBN 10: 1118717961 ISBN 13: 9781118717967

Verlag: John Wiley & Sons Inc, 2016

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A FULLY COMPREHENSIVE EXAMINATION OF STATE–OF–THE–ART TECHNOLOGIES FOR MEASUREMENT AT THE SMALL SCALE HIGHLIGHTS THE ADVANCED RESEARCH WORK FROM INDUSTRY AND ACADEMIA IN MICRO–NANO DEVICES TEST TECHNOLOGY WRITTEN AT BOTH INTRODUCTORY AND ADVANCED LEVELS, PROVIDES THE FUNDAMENTALS AND THEORIES FOCUSES ON THE MEASUREMENT TECHNIQUES FOR CHARACTERIZING MEMS/NEMS DEVICES

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Rese�a del editor

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices

Biograf�a del autor

Wendong Zhang, President & Professor, North University of China, Shanxi Province, China. Dr Zhang has over 30 years experience working in the areas of dynamic testing techniques and Micro-nano-electromechanical systems (MEMS and NEMS). He is Deputy Director of the Ordnance Institute of China, Executive Member of Mirco-Nanometer Technology Institute of China and the Chairman of the Youth Science and Technology Association of Shanxi Province. He is the leading author of three books including an English book. He is also the winner of a couple of national and provincial level prizes. Xiujian Chou, Associate Professor in North University of China. Engaged in research electronics, information functional materials and micro devices. Tielin Shi, Huazhong?University?of?Science?and?Technology, China. Zongmin Ma, North University of China, China. Haifei Bao, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sceinces, China. Jing Chen, Peking?University, China. Liguo Chen, Soochow University, China. Dachao Li, Associate Professor, Tianjin University, China; is engaged in MEMS devices and micro-instruments, micro-nanometer detection technology. Chenyang Xue, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China.

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