Physics of Radiofrequency Capacitive Discharge - Hardcover

Savinov, V. P.

Hardcover

ISBN 10: 1138600806 ISBN 13: 9781138600805

Verlag: Taylor & Francis Ltd, 2018

Inhaltsangabe

This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.

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Über die Autorin bzw. den Autor

V. P. Savinov

Details zur Ausgabe

• Verlag: Taylor & Francis Ltd
• Erscheinungsdatum: 2018
• Sprache: Englisch
• ISBN 10: 1138600806
• ISBN 13: 9781138600805
• Einband: Gebundene Ausgabe
• Auflage: 1
• Anzahl der Seiten: 322
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Taylor & Francis Verlag GmbH; GPSR@taylorandfrancis.com; ; Kaufingerstraße 24, 80331 München, Germany; München; Deutschland