Fundamentals of Microelectromechanical Systems (MEMS) - Hardcover

Kim, Eun Sok

Hardcover

ISBN 10: 1264257589 ISBN 13: 9781264257584

Verlag: McGraw Hill, 2021

Inhaltsangabe

Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product. A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes: Basic microfabrication Micromachining Transduction principles RF and optical MEMS Mechanics and inertial sensors Thin film properties and SAW/BAW sensors Pressure sensors and microphones Piezoelectric films Material properties expressed as tensor Microfluidic systems and BioMEMS Power MEMS Electronic noises, interface circuits, and oscillators

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Über die Autorin bzw. den Autor

Eun Sok Kim, Ph.D., is a professor in the department of Electrical and Computer Engineering-Electrophysics at University of Southern California, Los Angeles. He is an expert in piezoelectric and acoustic MEMS as well as electromagnetic vibration-en

Details zur Ausgabe

• Verlag: McGraw Hill
• Erscheinungsdatum: 2021
• Sprache: Englisch
• ISBN 10: 1264257589
• ISBN 13: 9781264257584
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 416
• Kontakt zum Hersteller: preigu GmbH & Co. KG; mail@preigu.de; ; Lengericher Landstr. 19; Osnabrück; Niedersachsen; 49078; Deutschland