Micro Electromechanical Systems (MEMS): Practical Lab Manual (IEEE Press Series on Sensors) - Hardcover

Hardcover

ISBN 10: 1394229836 ISBN 13: 9781394229833

Verlag: Wiley-IEEE Press, 2025

Inhaltsangabe

Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices

Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.

The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.

The book covers additional topics such as:

• Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation
• Simulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing
• X-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy
• Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field

A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.

Über diesen Titel

Über die Autorin bzw. den Autor

SANKET GOEL, PH.D., is a Professor with the Department of Electrical and Electronics Engineering and Principal Investigator with the MEMS, Microfluidics and Nanoelectronics (MMNE) Lab at BITS Pilani, Hyderabad Campus, Hyderabad, India.

Von der hinteren Coverseite

Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices

Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.

The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.

The book covers additional topics such as:

• Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation
• Simulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing
• X-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy
• Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field

A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.

Details zur Ausgabe

• Verlag: Wiley-IEEE Press
• Erscheinungsdatum: 2025
• Sprache: Englisch
• ISBN 10: 1394229836
• ISBN 13: 9781394229833
• Einband: Gebundene Ausgabe
• Auflage: 1
• Anzahl der Seiten: 208
• Herausgeber: Goel Sanket
• Kontakt zum Hersteller: Wiley-VCH GmbH; product_safety@wiley.com; ; Boschstrasse 12; Weinheim; 69469; Deutschland