High Resolution Focused Ion Beams: FIB and its Applications : The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology - Softcover
Inhaltsangabe
Preface. About the Authors. Introduction. 1. Field Ionization Sources. 2. Physics of Liquid Metal Ion Sources. 3. Ion Optics for LMIS. 4. Interactions of Ions with Solids. 5. Practical Focused Ion Beam Optics and Systems. 6. Applications of Focused Ion Beams. Appendix 1. Elements of the Theory of Field Desorption and Ionization. Appendix 2. Table of Sputter Yields. Index.
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