Advanced Metallization and Interconnect Systems for ULSI Applications in 1995: Volume 11: 5-11 (MRS Conference Proceedings) - Hardcover

Hardcover

ISBN 10: 155899341X ISBN 13: 9781558993419

Verlag: Materials Research Society, 2000

Inhaltsangabe

Adv Metallization Interconnect V11 Hb editado por Cambridge

Über diesen Titel

Reseña del editor

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Reseña del editor

This volume is the 12th in a successful series previously known as Advanced Metallization for ULSI Applications. The addition of Interconnect Systems to the conference name is indicative of the growth and venue of topics which have been incorporated into the conference over the past several years. The volume features a keynote address on "Process Technologies for High-Performance Multilevel Metallization Schemes" and a special section on low-k dielectric materials and systems.

Details zur Ausgabe

• Verlag: Materials Research Society
• Erscheinungsdatum: 2000
• ISBN 10: 155899341X
• ISBN 13: 9781558993419
• Einband: Tapa dura
• Sprache: Englisch
• Anzahl der Seiten: 767
• Herausgeber: Ellwanger Russell C., Wang Shi-Qing