Advanced Metallization Conference in 1998 (AMC 1998): Volume 14: Proceedings of the Conference Held October 6-8, 1998, in Colorado Springs, Colorado, ... University: 5-14 (MRS Conference Proceedings) - Hardcover

Hardcover

ISBN 10: 155899484X ISBN 13: 9781558994843

Verlag: Materials Research Society, 2000

Inhaltsangabe

Adv Metallizatn Conference 1998 V14 Hb editado por Cambridge

Über diesen Titel

Reseña del editor

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Reseña del editor

This volume, the newest in a series dedicated to leading-edge research for advanced metallization in integrated circuit applications, represents an industry milestone by switching to Cu-based metallization. The conference, which originated as Tungsten Workshop in the early 1980s, was later changed to Advanced Metallization and Interconnect Systems for ULSI Applications. It has now been renamed once again, this time to Advanced Metallization Conference (AMC), in order to better represent its expanded scope. The volume features two keynote addresses -- one on "Shift to Copper and Low-k at SEMATECH", the other on "ULSI Scaling and Interconnect Technology".

Details zur Ausgabe

• Verlag: Materials Research Society
• Erscheinungsdatum: 2000
• ISBN 10: 155899484X
• ISBN 13: 9781558994843
• Einband: Tapa dura
• Sprache: Englisch
• Anzahl der Seiten: 804
• Herausgeber: Sandhu Gurtej S., Koerner Heinrich, Murakami Masanori, Yasuda Yukio, Kobayashi Nobuyoshi