Characterization and Metrology for ULSI Technology: 1998 International Conference, 23-27 March 1998: National Institute of Standards and Technology, Gaithersburg MD, USA (AIP Conference Proceedings) - Hardcover

Hardcover

ISBN 10: 1563967537 ISBN 13: 9781563967535

Verlag: AIP Press, 1998

Inhaltsangabe

The proceedings of the 1998 International Conference on Characterization and Metrology for ULSI Technology was dedicated to summarizing major issues and giving critical reviews of important semiconductor techniques that are crucial to continue the advances in semiconductor technology. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing. This is the only book that we know of that emphasizes the science and technology of semiconductor characterization in the factory environment. The increasing importance of monitoring and controlling semiconductor processes make it particularly timely.

Details zur Ausgabe

• Verlag: AIP Press
• Erscheinungsdatum: 1998
• Sprache: Englisch
• ISBN 10: 1563967537
• ISBN 13: 9781563967535
• Einband: Gebundene Ausgabe
• Anzahl der Seiten: 960
• Herausgeber: Seiler D.G., Diebold A.C., Bullis W.M., Shaffner T.J., McDonald R., Walters E.J.
• Kontakt zum Hersteller: Nicht verfügbar
• Verantwortliche Person: Nicht verfügbar