Introduction to Metrology Applications in Ic Manufacturing (Tutorial Texts) - Softcover

Su, Bo; Solecky, Eric; Vaid, Alok

 
9781628418118: Introduction to Metrology Applications in Ic Manufacturing (Tutorial Texts)
Softcover
ISBN 10: 1628418117 ISBN 13: 9781628418118
Verlag: SPIE Press, 2015

Inhaltsangabe

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had a book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. The accompanying CD includes example spreadsheets of measurement uncertainty analysis―specifically, precision, matching, and relative accuracy.

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Verlag
SPIE Press
Erscheinungsdatum
2015
Sprache
Englisch
ISBN 10 
1628418117
ISBN 13 
9781628418118
Einband
Taschenbuch
Anzahl der Seiten
164
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Buchbär
info@buchbaer.de

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