Inhaltsangabe
During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested.
Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.
Weitere beliebte Ausgaben desselben Titels
Suchergebnisse für Ellipsometry for Industrial Applications
Foto des Verkäufers
Ellipsometry for Industrial Applications.
Anbieter: books4less (Versandantiquariat Petra Gros GmbH & Co. KG), Welling, Deutschland
Verkäuferbewertung 5 von 5 Sternen
Broschiert. Zustand: Gut. 99 Seiten; Das hier angebotene Buch stammt aus einer teilaufgelösten wissenschaftlichen Bibliothek und trägt die entsprechenden Kennzeichnungen (Rückenschild, Instituts-Stempel.); Schnitt und Einband sind etwas staubschmutzig; der Buchzustand ist ansonsten ordentlich und dem Alter entsprechend gut. Text in ENGLISCHER Sprache! Sprache: Englisch Gewicht in Gramm: 250. Bestandsnummer des Verkäufers 1597183
Gebraucht kaufen
EUR 14,45
EUR 9,95 Versand
Versand von Deutschland nach USA
Versand von Deutschland nach USA
Anzahl: 1 verfügbar
Beispielbild für diese ISBN
Ellipsometry for Industrial Applications
Anbieter: BookOrders, Russell, IA, USA
Verkäuferbewertung 4 von 5 Sternen
Soft Cover. Zustand: Fair. Soft cover. Usual ex-library features. The interior is clean and tight. Binding is good. Cover shows slight wear and is scuffed from removal of library labels. 99 pages. Ex-Library. Bestandsnummer des Verkäufers 034318
Gebraucht kaufen
EUR 31,01
EUR 3,44 Versand
Versand innerhalb von USA
Versand innerhalb von USA
Anzahl: 1 verfügbar
Beispielbild für diese ISBN
Ellipsometry for Industrial Applications
Anbieter: Ria Christie Collections, Uxbridge, Vereinigtes Königreich
Verkäuferbewertung 5 von 5 Sternen
Zustand: New. In. Bestandsnummer des Verkäufers ria9783211820407_new
Neu kaufen
EUR 57,85
EUR 13,74 Versand
Versand von Vereinigtes Königreich nach USA
Versand von Vereinigtes Königreich nach USA
Anzahl: Mehr als 20 verfügbar
Foto des Verkäufers
Ellipsometry for Industrial Applications
Verlag:
Springer, Springer Dez 1987, 1987
ISBN 10: 321182040X
ISBN 13: 9783211820407
Neu
Taschenbuch
Anbieter: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Deutschland
Verkäuferbewertung 5 von 5 Sternen
Taschenbuch. Zustand: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic 'in situ' measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic 'in situ' measurements are suggested. 116 pp. Englisch. Bestandsnummer des Verkäufers 9783211820407
Neu kaufen
EUR 53,49
EUR 23,00 Versand
Versand von Deutschland nach USA
Versand von Deutschland nach USA
Anzahl: 2 verfügbar
Beispielbild für diese ISBN
Ellipsometry for Industrial Applications
Anbieter: Books Puddle, New York, NY, USA
Verkäuferbewertung 4 von 5 Sternen
Zustand: New. pp. 116. Bestandsnummer des Verkäufers 2697970825
Neu kaufen
EUR 76,31
EUR 3,43 Versand
Versand innerhalb von USA
Versand innerhalb von USA
Anzahl: 4 verfügbar
Beispielbild für diese ISBN
Ellipsometry for Industrial Applications
Print-on-DemandAnbieter: Majestic Books, Hounslow, Vereinigtes Königreich
Verkäuferbewertung 4 von 5 Sternen
Zustand: New. Print on Demand pp. 116 67:B&W 6.69 x 9.61 in or 244 x 170 mm (Pinched Crown) Perfect Bound on White w/Gloss Lam. Bestandsnummer des Verkäufers 94459222
Neu kaufen
EUR 75,41
EUR 7,45 Versand
Versand von Vereinigtes Königreich nach USA
Versand von Vereinigtes Königreich nach USA
Anzahl: 4 verfügbar
Beispielbild für diese ISBN
Ellipsometry for Industrial Applications
Print-on-DemandAnbieter: Biblios, Frankfurt am main, HESSE, Deutschland
Verkäuferbewertung 4 von 5 Sternen
Zustand: New. PRINT ON DEMAND pp. 116. Bestandsnummer des Verkäufers 1897970819
Neu kaufen
EUR 76,71
EUR 9,95 Versand
Versand von Deutschland nach USA
Versand von Deutschland nach USA
Anzahl: 4 verfügbar
Foto des Verkäufers
Ellipsometry for Industrial Applications
Print-on-DemandAnbieter: moluna, Greven, Deutschland
Verkäuferbewertung 5 von 5 Sternen
Zustand: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-co. Bestandsnummer des Verkäufers 4488574
Neu kaufen
EUR 48,37
EUR 48,99 Versand
Versand von Deutschland nach USA
Versand von Deutschland nach USA
Anzahl: Mehr als 20 verfügbar
Foto des Verkäufers
Ellipsometry for Industrial Applications
Verlag:
Springer, Springer Dez 1987, 1987
ISBN 10: 321182040X
ISBN 13: 9783211820407
Neu
Taschenbuch
Anbieter: buchversandmimpf2000, Emtmannsberg, BAYE, Deutschland
Verkäuferbewertung 5 von 5 Sternen
Taschenbuch. Zustand: Neu. This item is printed on demand - Print on Demand Titel. Neuware -During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic 'in situ' measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic 'in situ' measurements are suggested.Springer-Verlag KG, Sachsenplatz 4-6, 1201 Wien 116 pp. Englisch. Bestandsnummer des Verkäufers 9783211820407
Neu kaufen
EUR 53,49
EUR 60,00 Versand
Versand von Deutschland nach USA
Versand von Deutschland nach USA
Anzahl: 1 verfügbar
Foto des Verkäufers
Ellipsometry for Industrial Applications
Anbieter: AHA-BUCH GmbH, Einbeck, Deutschland
Verkäuferbewertung 5 von 5 Sternen
Taschenbuch. Zustand: Neu. Druck auf Anfrage Neuware - Printed after ordering - During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic 'in situ' measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic 'in situ' measurements are suggested.; During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic 'in situ' measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic 'in situ' measurements are suggested. Bestandsnummer des Verkäufers 9783211820407
Neu kaufen
EUR 53,49
EUR 61,08 Versand
Versand von Deutschland nach USA
Versand von Deutschland nach USA
Anzahl: 1 verfügbar