Verwandte Artikel zu Design for Manufacturability with Advanced Lithography

Design for Manufacturability with Advanced Lithography - Softcover

Yu, Bei; Pan, David Z.

 
9783319373935: Design for Manufacturability with Advanced Lithography
Softcover
ISBN 10: 3319373935 ISBN 13: 9783319373935
Verlag: Springer, 2016

Inhaltsangabe

This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM solutions from a circuit design level, such that most of the critical problems can be formulated and solved through combinatorial algorithms.

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This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms/methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level, or physical manufacturing level, this book describes DFM solutions from a circuit design level, such that most of the critical problems can be formulated and solved through combinatorial algorithms.

  • Enables readers to tackle the challenge of layout decompositions for different patterning techniques;
  • Presents a coherent framework, including standard cell compliance and detailed placement, to enable Triple Patterning Lithography (TPL) friendly design;
  • Includes coverage of the design for manufacturability with E-Beam lithography.

„Über diesen Titel“ kann sich auf eine andere Ausgabe dieses Titels beziehen.

Verlag
Springer
Erscheinungsdatum
2016
Sprache
Englisch
ISBN 10 
3319373935
ISBN 13 
9783319373935
Einband
Taschenbuch
Anzahl der Seiten
176
Kontakt zum Hersteller
ProductSafety@springernature.com
ProductSafety@springernature.com

Poststr. 9
Darmstadt
64293
Deutschland

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9783319203843: Design for Manufacturability with Advanced Lithography

Vorgestellte Ausgabe

ISBN 10:  3319203843 ISBN 13:  9783319203843
Verlag: Springer, 2015
Hardcover