Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems - Softcover

Softcover

ISBN 10: 352733498X ISBN 13: 9783527334988

Verlag: Wiley-VCH Verlag GmbH, 2013

Über diesen Titel

Críticas

"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies." Advanced Materials "... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..." MRS Bulletin

Reseña del editor

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

Details zur Ausgabe

• Verlag: Wiley-VCH Verlag GmbH
• Erscheinungsdatum: 2013
• ISBN 10: 352733498X
• ISBN 13: 9783527334988
• Einband: Tapa blanda
• Sprache: Englisch
• Anzahl der Seiten: 439
• Herausgeber: Baltes Henry, Brand Oliver, Fedder Gary K., Hierold Christofer, Korvink Jan G., Tabata Osamu