The main objective of this book is to present the basic theoretical principles and practical applications for the classical interferometric techniques and the most advanced methods in the field of modern fringe pattern analysis applied to optical metrology. A major novelty of this work is the presentation of a unified theoretical framework based on the Fourier description of phase shifting interferometry using the Frequency Transfer Function (FTF) along with the theory of Stochastic Process for the straightforward analysis and synthesis of phase shifting algorithms with desired properties such as spectral response, detuning and signal-to-noise robustness, harmonic rejection, etc.
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Manuel Servin received his engineering diploma from the École Nationale Supérieure des Télécommunications in France (1982), and his Ph.D. from the Centro de Investigaciones en Óptica A. C. (CIO) at Leon Mexico in 1994. He is co-author of the book `Interferogram Analysis for Optical Testing?. Dr. Servin has published more than 100 papers in scientific peer-reviewed journals on Digital Interferometry and Fringe Analysis.
Juan Antonio Quiroga received his Ph.D. in physics in 1994 from the Universidad Complutense de Madrid, Spain. He is now teaching there at the Physics Faculty. His current principal areas of interest are Digital image processing applied to Optical Metrology and applied optics
Moises Padilla is a Ph.D. student in optical sciences at the Centro de Investigaciones en Óptica (CIO) at León Mexico. He is associated with the optical metrology division of the CIO. His research activities are in digital signal processing and electrical communication engineering applied to processing and analysis of optical interferogram images.
This book presents the theoretical principles and practical applications for classical and advanced interferometry in optical-metrology. A major novelty of this work is the use of the Frequency Transfer Function (FTF) and the theory of Stochastic Process in fringe pattern analysis. These mathematical tools better describe the phase demodulation algorithms with desired spectral response, detuning insensitivity, signal-to-noise robustness and harmonic rejection.
From the contents:
This book presents the theoretical principles and practical applications for classical and advanced interferometry in optical-metrology. A major novelty of this work is the use of the Frequency Transfer Function (FTF) and the theory of Stochastic Process in fringe pattern analysis. These mathematical tools better describe the phase demodulation algorithms with desired spectral response, detuning insensitivity, signal-to-noise robustness and harmonic rejection.
From the contents:
• Digital Linear Systems
• Synchronous Temporal Interferometry
• Asynchronous Temporal Interferometry
• Spatial Methods with Carrier
• Spatial Methods without Carrier
• Phase Unwrapping
• List of 40 Phase-Shifting Algorithms
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