Thin Films Material Technology: Sputtering of Compound Materials - Hardcover

Wasa, Kiyotaka; Kitabatake, Makoto; Adachi, Hideaki

 
9783540211181: Thin Films Material Technology: Sputtering of Compound Materials
Hardcover
ISBN 10: 3540211187 ISBN 13: 9783540211181
Verlag: Springer, 2004

Inhaltsangabe

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin film, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts.

Key topics: Principles and examples of making thin-film materials and devices such as nanometer composite thin films, nanometer superlattice of compound ceramics, micro-sensors and actuators, micro-MEMS, mobile compact/flexible ferroelectric memory, flat display including plasma display and PLD, and thin film catalysis, solar battery, and large-area functional window glass coating for energy and environmental uses; Covers techniques in automotive parts coatings :non-peel plastics coatings with metal, alloy, and compound films.

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Verlag
Springer
Erscheinungsdatum
2004
Sprache
Englisch
ISBN 10 
3540211187
ISBN 13 
9783540211181
Einband
Gebundene Ausgabe
Anzahl der Seiten
532
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
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