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Electromigration: Studied with the Optical Microscopy Imaging Method - Softcover

Li, Linghong

 
9783639088137: Electromigration: Studied with the Optical Microscopy Imaging Method

Inhaltsangabe

Electromigration is a microscopic phenomenoninvolving electric field-induced diffusion, which isvery relevant to damage in interconnections. Acommon method for monitoring interconnectiondegradation is through electrical resistancemeasurements, which requires direct electricalcontact. It is desirable to develop non-contactmethods to monitor electromigration damageformation. In this thesis, we propose a novelOptical Microscopy Imaging Method (OMIM), and weprovide a theoretical description and experimentalresults. OMIM not only provides a new method forstudying electromigration, but also provides auseful method for studying other micro-devices andmaterials in a non- contact mode.

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