Investigation Of AlN Films And Creating Devices Based On Them - Softcover

Khanbekov, Rinat

 
9783659708213: Investigation Of AlN Films And Creating Devices Based On Them
Softcover
ISBN 10: 3659708216 ISBN 13: 9783659708213
Verlag: LAP LAMBERT Academic Publishing, 2015

Inhaltsangabe

Progress of the modern means of communication, which mostly involves the increase of operating frequency of devices, dictates the necessity of implementing new materials that would allow to access higher frequencies in the microwave band. A number of exceptional characteristics make aluminum nitride a quite perspective material for a great variety of implementations, especially for creating acoustoelectronic devices. The goals of the present work were studying the processes of acquiring the aluminum nitride thin films using RF magnetron sputtering technique and investigating the possibilities of applying these films to create acoustoeletronic devices working on microwave and extremely high frequencies.

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Reseña del editor

Progress of the modern means of communication, which mostly involves the increase of operating frequency of devices, dictates the necessity of implementing new materials that would allow to access higher frequencies in the microwave band. A number of exceptional characteristics make aluminum nitride a quite perspective material for a great variety of implementations, especially for creating acoustoelectronic devices. The goals of the present work were studying the processes of acquiring the aluminum nitride thin films using RF magnetron sputtering technique and investigating the possibilities of applying these films to create acoustoeletronic devices working on microwave and extremely high frequencies.

Biografía del autor

Rinat Naimovich Khanbekov, graduate of the Solid State Physics Department of Saratov State University. Worked in the Metamaterials laboratory of SSU, Saratov.

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Verlag
LAP LAMBERT Academic Publishing
Erscheinungsdatum
2015
Sprache
Englisch
ISBN 10 
3659708216
ISBN 13 
9783659708213
Einband
Tapa blanda
Anzahl der Seiten
64
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Verantwortliche Person
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