Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces Ucpss ... September 2002 (Solid State Phenomena) - Softcover

 
9783908450788: Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces Ucpss ... September 2002 (Solid State Phenomena)
Softcover
ISBN 10: 3908450780 ISBN 13: 9783908450788
Verlag: Trans Tech Publications Ltd, 2003

Inhaltsangabe

The issues addressed by the Sixth International Symposium on the Ultra Clean Processing of Silicon Surfaces included all aspects of ultra-clean Si-technology, cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
This covered studies of Si-surface chemistry and topography and its relationship to device performance and process yield, cleaning in relationship to new gate stacks, cleaning at the interconnect level, resist stripping and polymer removal, cleaning and contamination control of various new materials, wafer backside cleaning and cleaning following Chemical-Mechanical-Polishing (CMP).

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Verlag
Trans Tech Publications Ltd
Erscheinungsdatum
2003
Sprache
Englisch
ISBN 10 
3908450780
ISBN 13 
9783908450788
Einband
Taschenbuch
Anzahl der Seiten
320
Herausgeber
Heyns Marc, Mertens Paul, Meuris Marc
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar