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Ultra Clean Processing of Semiconductor Surfaces IX (Solid State Phenomena) - Softcover

 
9783908451648: Ultra Clean Processing of Semiconductor Surfaces IX (Solid State Phenomena)
Softcover
ISBN 10: 3908451647 ISBN 13: 9783908451648
Verlag: Trans Tech Publications Ltd, 2009

Inhaltsangabe

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The contents of this publication include every conceivable issue related to contamination, cleaning and surface preparation during mainstream large-scale integrated circuit manufacture. Typically, silicon is used as the main semiconductor substrate. However, other semiconducting materials such as SiGe and SiC are currently being used in the source-sink junction areas, and materials such as Ge and III-V compounds are being considered for the transistor channel region of future-generation devices.

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Verlag
Trans Tech Publications Ltd
Erscheinungsdatum
2009
Sprache
Englisch
ISBN 10 
3908451647
ISBN 13 
9783908451648
Einband
Taschenbuch
Auflage
1
Anzahl der Seiten
412
Herausgeber
Ltd Trans Tech Publications, Mertens Paul, Meuris Marc, Heyns Marc
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar