Ultra Clean Processing of Semiconductor Surfaces IX (Solid State Phenomena) - Softcover

 
9783908451648: Ultra Clean Processing of Semiconductor Surfaces IX (Solid State Phenomena)
Softcover
ISBN 10: 3908451647 ISBN 13: 9783908451648
Verlag: Trans Tech Publications Ltd, 2009

Inhaltsangabe

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The contents of this publication include every conceivable issue related to contamination, cleaning and surface preparation during mainstream large-scale integrated circuit manufacture. Typically, silicon is used as the main semiconductor substrate. However, other semiconducting materials such as SiGe and SiC are currently being used in the source-sink junction areas, and materials such as Ge and III-V compounds are being considered for the transistor channel region of future-generation devices.

Die Inhaltsangabe kann sich auf eine andere Ausgabe dieses Titels beziehen.

Verlag
Trans Tech Publications Ltd
Erscheinungsdatum
2009
Sprache
Englisch
ISBN 10 
3908451647
ISBN 13 
9783908451648
Einband
Taschenbuch
Auflage
1
Anzahl der Seiten
412
Herausgeber
Ltd Trans Tech Publications, Mertens Paul, Meuris Marc, Heyns Marc
Kontakt zum Hersteller
Nicht verfügbar
Verantwortliche Person
Nicht verfügbar